| Vacuum Industry | Year | Equipment Develoment | Credit | |
| 1643 | Mercury Barometer |
Torricelli | ||
| 1849 | Bourdon Gauge |
Bourdon | ||
| Founded | 1850 | |||
| Founded | Heraeus |
1851 | ||
| 1855 | Mercury piston pump |
Geissler | ||
| 1865 | Mercury siphon pump |
Sprengel | ||
| 1874 | Herbert G. Mcleod | |||
| Founded | 1885 | |||
| Founded | 1890 | |||
| Founded | 1895 | |||
| 1906 | Pirani | |||
| Voege | ||||
| 1910 | ||||
| 1913 | Mercury vapour diffusion pump |
Langmuir, Gaede | ||
Molecular drag pump |
Gaede, Holweck | |||
| 1916 | Hot cathode ionization gauge |
Buckley | ||
| 1917 | Lorenz | |||
| Founded | 1919 | |||
| 1924 | Stokes Co. | |||
| 1926 | Burch, Hickma | |||
| 1929 | Capacitance manometer |
Olsen & Hurst | ||
| Founded | 1934 | |||
| Founded | 1938 | |||
| 1943 | Backus, Noir, Manhattan Project | |||
| Founded | 1946 | |||
| Founded | 1947 | |||
| Founded | 1948 | |||
| Founded | 1952 | |||
| Founded | 1953 | Better pumping with evaporated Ti |
Herb | |
| 1954 | Hot cathode Magnetron vacuum gauge |
Conn & Daglish | ||
| 1955 | Commercial Roots Vacuum Pump |
Leybold, Philander and Francis Marion Roots | ||
| 1957 | Becker, Pfeiffer | |||
| Founded | 1958 | |||
| 1958 | First Integrated Circuit (Germanium) |
Jack Kilby (Texas Inst.) | ||
| 1958 | Second Integrated Printed Circuit (Silicon) |
Robert Noyce, Traitorous Eight, (Fairchild) | ||
| 1959 |
Hall, Varian | |||
| Founded | 1959 | Cold cathode Magnetron vacuum gauge | Penning | |
| Founded | MKS Instuments |
1961 | Wolfe | |
| Founded | ||||
| Founded | 1962 | |||
| 1962 | A partial pressure of 10^-17mbar is measured with magnetic-sector mass spectrometer |
William D. Davis | ||
| Founded | 1963 | |||
| Founded | 1964 | |||
| Founded | 1967 | |||
| 1969 | Association of Vacuum Equipment Manufacturers AVEM Founded |
AVEM | ||
| Merged | ||||
| Founded | 1973 | |||
| Founded | 1974 | |||
| 1978 | Stokes Co. | |||
| Founded | 1980 | Thermal FM/MFC instruments |
MKS | |
| Founded | 1983 | |||
| Founded | 1988 | |||
| 1989 | All metal MFCs |
MKS | ||
| Founded | 1990 | |||
| 1992 | Hybrid turomolecular/molecular drag pump |
|||
| 1994 | Mini Baratron |
MKS | ||
| Founded | 1995 | |||
| Acquires | 2001 |